In situ method of densification for powder-based piezoelectric thick films for microelectromechanical system applications

Jae Hong Park; Hyoung-Ho Park

In situ method of densification for powder-based piezoelectric thick films for microelectromechanical system applications

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In situ method of densification for powder-based piezoelectric thick films for microelectromechanical system applications

Author(s): Jae Hong Park and Hyoung-Ho Park
DOI: 10.1049/mnl.2011.0339

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Author(s): Jae Hong Park ¹ and Hyoung-Ho Park ²
- Affiliations: 1: Division of Nano-Convergence Technology, Korea National NanoFab Center, Deajeon, Republic of Korea
  2: Department of Ceramic Engineering, Yonsei University, Seoul, Republic of Korea
Source: Volume 6, Issue 9, September 2011, p. 749 – 754
DOI: 10.1049/mnl.2011.0339 , Online ISSN 1750-0443

Published

Piezoelectric (PZT) (Pb(Zr_0.52Ti_0.48)O₃) thick film-based microtransducers demonstrate excellent piezoelectric performances. PZT thick films on Si-based substrate can be used as piezoelectric actuators and sensors with the introduction of microelectromechanical system technology and the screen printing method. However, the thick films made just by the screen printing method have high porosity compared with bulk product, and the PZT thick films on Si-based substrate have problems regarding degradation of active materials and interface properties owing to inter-diffusion or reaction between Si substrate and PZT materials at high temperature for sintering. Thus, the authors have fabricated screen printed PZT thick films on Si substrate using the screen printing method and sol infiltration for enhancing densification. Ethanol-based photo-cross-linkable sol and conventional diol-based sol were used to compare influence of patterning process. Thick films with relative high densities at low temperature, 800°C and without inter-diffusion and reaction between the layers and thick film were accomplished. Also, it was revealed that the PZT thick film treated by ethanol-based photo-cross-linkable sol showed better electrical properties as well as excellent patternability.

References

1. 1)
  - N. Ikegami , T. Matsui , J. Kanamori . Dry-etching mechanism of sputtered Pb(Zr1−xTix)O3 film. Jpn. J. Appl. Phys. , 2505 - 2511
2. 2)
  - M. Alexe , A.F. Scott , C. Curran , N.D. Zakharov , D. Hesse , A. Pignolet . Self-patterning nano electrode on ferroelectric thin films for gigabit memory applications. J. Appl. Phys. Lett. , 1592 - 1594
3. 3)
  - J.-S. Hwang , W.S. Kim , H.H. Park , T.S. Kim . The effect of intermediate anneal on the ferroelectric properties of direct-patternable PZT films. Sens. Actuators A Phys. , 137 - 142
4. 4)
  - G.Y. Kang , S.-W. Bae , H.H. Park , T.S. Kim . Fabrication and electromechanical properties of a self-actuating Pb(Zr0.52Ti0.48)O3 microcantilever using a direct patternable sol-gel method. Appl. Phys. Lett.
5. 5)
  - J.H. Park , T.Y. Kwon , H.J. Kim . Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film. J. Electroceramics , 565 - 572
6. 6)
  - S.P. Beeby , A. Blackburn , N.M. White . Processing of PZT piezoelectric thick films on silicon for micro electro mechanical systems. J. Micromech. Microeng. , 218 - 229
7. 7)
  - H. Uchida , N. Soyama , K. Kageyama , K. Ogi , C.A. Paz de Araujo . Preparation and characteristics of self-patterned ferroelectric thin films from photo-sensitive SrBi2(Ta1−x,Nbx)2O9 solutions. FMA-13 , 193 - 194
8. 8)
  - N.C. Das . Release of multi-layer metal structure in MEMS devices by dry etching technique. Solid State Electron. , 501 - 504
9. 9)
  - J. Lu , T. Ikehara , M. Konno , R. Maeda , T. Mihara . Sensitivity of micro cantilever mass sensor transduced by PZT film. IEEE Trans. Sens. Micromach. , 126 - 130
10. 10)
  - J.H. Lee , K.H. Yoon , T.S. Kim . Characterization of resonant behavior and sensitivity using micromachined PZT cantilever. Integr. Ferroelectr. , 43 - 52
11. 11)
  - G. Uozumi , K. Kageyama , T. Atsuki , N. Soyama , H. Uchida , K. Ogi . Evaluation of self-patterned PbZrxTi1−xO3 thin film from photosensitive solution. Jpn. J. Appl. Phys. , 5350 - 5353
12. 12)
  - S.P. Beeby , A. Blackburn , N.M. White . Silicon micromachining processes combined with thick-film printed PZT actuators for microelectromechanical systems (MEMS). Mater. Lett.
13. 13)
  - R. Maeda , J. Tsaur , S.H. Lee , M. Ichiki . Piezoelectric microactuator devices. J. Electroceramics , 89 - 100
14. 14)
  - R.A. Dorey , R.W. Whatmore . Electroceramic thick film fabrication for MEMS. J. Electroceramics , 19 - 32
15. 15)
  - X.-H. Xu , J.-R. Chu . Preparation of a high-quality PZT thick film with performance comparable to those of bulk materials for applications in MEMS. J. Micromech. Microeng. , 065001 - 065007
16. 16)
  - T.M. Shaw , S.T. McKinstry , P.C. McIntyre . The properties of ferroelectric films at small dimensions. Annu. Rev. Mater. Sci. , 263 - 298
17. 17)
  - M. Alexe , A. Gruverman , C. Harnagea . Memory cells of an average lateral size of 0.18 m formed via a self-assembling process. J. Appl. Phys. Lett. , 1158 - 1160
18. 18)
  - C. Zinck , D. Pinceau , E. Defay , E. Delevoye , D. Barbier . Development and characterization of membranes actuated by a PZT thin film for MEMS applications. Sens. Actuators A: Phys. , 483 - 489
19. 19)
  - Q.-M. Wang , Q. Zhang , B. Xu , R. Liu , E.L. Cross . Nonlinear piezoelectric behavior of ceramic bending mode actuators under strong electric fields. J. Appl. Phys. , 3352 - 3360
20. 20)
  - J.H. Park , T.Y. Kwon , D.S. Yoon , H. Kim , T.S. Kim . Fabrication of microcantilever sensors actuated by piezoelectric Pb(Zr0.52Ti0.48)O3 thick films and determination of their electromechanical characteristics. Adv. Funct. Mater. , 2021 - 2028
21. 21)
  - D.L. Polla , P.J. Schiller . Integrated ferroelectric microelectromechanical systems (MEMS). Integr. Ferroelectr. , 359 - 370
22. 22)
  - G.T. Park , J.J. Choi , J. Ryu , H. Fan , H.E. Kim . Measurement of piezoelectric coefficients of lead zirconate titanate thin films by strain-monitoring pneumatic loading method. J. Appl. Phys. Lett. , 4606 - 4608
23. 23)
  - M. Kohler . (1999) Etching in microsystem technology.
24. 24)
  - S.J. Kim , C.Y. Kang , J.W. Choi . Properties of piezoelectric actuator on silicon membrane, prepared by screen printing method. Mater. Chem. Phys. , 401 - 404
25. 25)
  - J.-S. Hwang , W.S. Kim , H.H. Park , T.S. Kim . Preparation of 0.5 µm thick self-patternable PZT films by sol–gel procedure for applying to the micro-detection system. Microelectron. Eng. , 73 - 77
26. 26)
  - N. Soyama , G. Sasaki , T. Atsuki , T. Yonezawa , K. Ogi . Preparation of dielectric thin films from photosensitive sol–gel solution. Jpn. J. Appl. Phys. , 5268 - 5271
27. 27)
  - F. Xu , F. Chu , S.T. Mckinstry . Longitudinal piezoelectric coefficient measurement for bulk ceramics and thin films using pneumatic pressure rig. J. Appl. Phys. , 588 - 594

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In situ method of densification for powder-based piezoelectric thick films for microelectromechanical system applications

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