Cantilever arrayed blood pressure sensor for arterial applanation tonometry

Byeungleul Lee; Jinwoo Jeong; Jinseok Kim; Bonghwan Kim; Kukjin Chun

Cantilever arrayed blood pressure sensor for arterial applanation tonometry

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Author(s): Byeungleul Lee ¹ ; Jinwoo Jeong ^{2, 3} ; Jinseok Kim ³ ; Bonghwan Kim ⁴ ; Kukjin Chun ²
- Affiliations: 1: Department of Mechatronics Engineering, Korea University of Technology and Education, Cheonan, Chungnam 330-708, Korea;
  2: Department of Electrical and Computer Engineering, Seoul National University, Seoul 151-742, Korea;
  3: Center for Bionics, Biomedical Research Institute, Korea Institute of Science and Technology, Seoul 130-650, Korea;
  4: Department of Electronics Engineering, Catholic University of Daegu, Gyeongsan, Gyeongbuk 712-702, Korea
Source: Volume 8, Issue 1, March 2014, p. 37 – 43
DOI: 10.1049/iet-nbt.2013.0046 , Print ISSN 1751-8741, Online ISSN 1751-875X

Received 16/06/2013, Accepted 11/10/2013, Revised 12/09/2013, Published 04/03/2014

The authors developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the non-invasive and continuous measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in the resistance of the piezoresistor on a 5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and the width of the unit membrane are 210 and 310 μm, respectively. The width of the insensible zone between the adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The good linearity of the result confirmed that the polydimethylsiloxane package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The maximum measurement range and the resolution of the fabricated blood pressure sensor were greater than 900 mmHg ( = 120 kPa) and less than 1 mmHg ( = 133.3 Pa), respectively.

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Cantilever arrayed blood pressure sensor for arterial applanation tonometry

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