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Non-linear coupling voltage of split-gate flash memory cells with additional top coupling gate

Non-linear coupling voltage of split-gate flash memory cells with additional top coupling gate

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The study presents the dependence of floating gate (FG) coupling potential, VFG on the source line (SL) programming voltage, VSL of the split-gate flash memory cells with an additional top coupling gate above FG, called the ‘SG-TCG’ cells. The mathematical analysis shows non-linear VFG against VSL behaviour of SG-TCG cells depending on the operation region of FG-MOSFETs. It is found that as the value of VSL increases, the value of VFG initially increases steeply, then gradually and finally, linearly with a lower slope. This anomalous VFG against VSL behaviour is because of the potential drop in the bulk of FG-MOSFETs by the applied VSL. The mathematical analysis, also, shows SL coupling factor (κSL) roll-off because of the increase in the FG-MOSFETs body potential with the increase in VSL. In addition, κSL is shown to approach a constant value in the saturation region of FG-MOSFETs where VFG is less susceptible to supply voltage fluctuation. The mathematical analysis agrees very well with the numerical device simulation. The study, clearly, shows that in order to achieve higher shift in programme cell threshold voltage and reduce performance variability owing to supply voltage fluctuation, the target programming bias VSL of nanoscale SG-TCG cells must be higher than the saturation voltage of FG-MOSFETs.

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