Buried annealed/proton-exchanged LiNbO3 waveguides fabricated by direct bonding technique
Buried annealed/proton-exchanged LiNbO3 waveguides fabricated by direct bonding technique
- Author(s): M. Fujimura ; K. Beniya ; T. Suhara
- DOI: 10.1049/el:20081471
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- Author(s): M. Fujimura 1 ; K. Beniya 1 ; T. Suhara 1
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View affiliations
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Affiliations:
1: Dept. Electric, Electronic, and Information Eng., Grad. School Eng., Osaka University, Suita, Japan
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Affiliations:
1: Dept. Electric, Electronic, and Information Eng., Grad. School Eng., Osaka University, Suita, Japan
- Source:
Volume 44, Issue 14,
03 July 2008,
p.
856 – 858
DOI: 10.1049/el:20081471 , Print ISSN 0013-5194, Online ISSN 1350-911X
A new method for fabrication of buried annealed/proton-exchanged LiNbO3 waveguides using direct bonding technique is demonstrated. The buried waveguides were fabricated and tested at 1.55 µm wavelength, and guided modes with excellent symmetry were obtained. The waveguides are suitable for efficient coupling to optical fibres and/or efficient nonlinear-optic wavelength conversion devices.
Inspec keywords: optical waveguides; lithium compounds; bonding processes; annealing; optical fabrication; integrated optics
Other keywords:
Subjects: Integrated optics; Optical waveguides; Integrated optics; Optical fabrication, surface grinding; Optical waveguides and couplers
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