A report is presented on the optical propagation loss of waveguides based on InP nanowires embedded in a benzocyclobutene matrix and fabricated through a wafer bonding process. Propagation loss was evaluated on waveguides of varying width; it can be as low as 0.8 dB/mm for a 300×300 nm InP.
Inspec keywords: optical materials; indium compounds; organic compounds; wafer bonding; III-V semiconductors; nanowires; optical losses; optical waveguides; optical fabrication; micro-optics
Other keywords:
Subjects: Micro-optical devices and technology; Micro-optical devices and technology; Optical fabrication, surface grinding; Optical waveguides and couplers; Other optical materials; Optical materials; Optical waveguides
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