Development of nanostructures for thermoelectric microgenerators using ion-track lithography
A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30–80 nm pore diameters) are used to grow Bi2Te3 nanowires by electroplating. The Bi2Te3 film's microstructural and thermoelectric properties are reported.
