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Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

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A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 µs.

Inspec keywords: phase shifters; silicon-on-insulator; micromechanical devices; optical communication equipment; optical waveguides; integrated optoelectronics; optical switches; Mach-Zehnder interferometers

Other keywords: single SOI chip; optical waveguides; 150 mus; power consumption; silicon-on-insulator; MEMS-based phase shifters; Si-SiO2; switching time; Monolithic integration; silicon waveguides; folded Mach-Zehnder interferometer switch

Subjects: Optical communication equipment; Optical communication devices, equipment and systems; Optical waveguides; Integrated optoelectronics; Micromechanical and nanomechanical devices and systems; MEMS and NEMS device technology; Metal-insulator-semiconductor structures; Optical interferometry; Optical waveguides and couplers

References

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      • Marom, D.M.: `Wavelength-selective 1×4 switch for 128 WDM channels at 50 GHz spacing', Optical Fiber Communication Conference, 2002 (OFC 2002), 17–22 March 2002, Anaheim, CA, USA, p. FB7-1–FB7-3.
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      • V.A. Aksyuk . 238×238 micromechanical optical cross connect. Photonics Technol. Lett.
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      • D.T. Fuchs . A hybrid MEMS-waveguide wavelength selective cross-connect. Photonics Technol. Lett.
    6. 6)
      • Day, I.E.: `Single-chip variable optical attenuator and multiplexer subsystem integration', Optical Fiber Communication Conference and Exhibit, 2002 (OFC 2002), 17–22 March 2002, Atlanta, GA, USA, p. 72–73.
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