Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique

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Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique

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Published

A novel micro-mirror for vertical optical output has been successfully fabricated in a singlemode silica-based planar lightwave circuit (PLC) on Si. An eight channel planar photodiode array was assembled on this PLC. The assembled PLC exhibited an average responsivity of 0.92 A/W and a responsivity deviation of 0.34 dB at a wavelength of 1.31 µm.

Inspec keywords: optical planar waveguides; mirrors; integrated optoelectronics; photodiodes; optical communication equipment; hybrid integrated circuits

Other keywords: micro-mirror fabrication technique; SiO2-Si; vertical optical output; responsivity deviation; eight channel PD-array; average responsivity; 1.31 micrometre; PLC; optical communication; optical hybrid ICs; singlemode planar lightwave circuit

Subjects: Photoelectric devices; Hybrid integrated circuits; Integrated optoelectronics; Optical communication

References

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      • C.G. Crookes , I.R. Croston , C.R. Pescod . Selfaligned integrated silica on silicon waveguide-photodiode interface. Electron. Lett. , 1002 - 1003
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      • Nakasuga, Y., Hashimoto, T., Yamada, Y., Terui, H., Yanagisawa, M., Moriwaki, K., Akahori, Y., Tormori, Y., Kato, K., Sekine, S., Horiguchi, M.: `Multi-chip hybrid integration on PLC platform using passive alignmenttechnique', Proc. 46th Electronic Components & Technology Conf., 1996, Orlando, p. 20–25.
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      • Y. Yamada , S. Suzuki , K. Moriwaki , Y. Hibino , Y. Tohmori , Y. Akutsu , Y. Nakasuga , T. Hashimoto , H. Terui , M. Yanagisawa , Y. Inoue , Y. Akahori , R. Nagase . Application of planar lightwave circuit platform to hybridintegrated optical WDM transmitter/receiver module. Electron. Lett. , 1366 - 1367
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