Hybrid integration of eight channel PD-array on silica-based PLC using micro-mirror fabrication technique
A novel micro-mirror for vertical optical output has been successfully fabricated in a singlemode silica-based planar lightwave circuit (PLC) on Si. An eight channel planar photodiode array was assembled on this PLC. The assembled PLC exhibited an average responsivity of 0.92 A/W and a responsivity deviation of 0.34 dB at a wavelength of 1.31 µm.