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Displacement sensor using channelled spectrum dispersed on a linear CCD array

Displacement sensor using channelled spectrum dispersed on a linear CCD array

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© The Institution of Electrical Engineers
Published

A novel form of low coherence interferometric sensor is described. The channelled spectrum produced by illuminating a sensing interferometer with a broadband source is analysed directly using a CCD array. The system currently provides unambiguous measurement over a range of 1.5 mm with an accuracy of better than 6 μm.

Inspec keywords: measurement by laser beam; CCD image sensors; light interferometers; optical sensors; displacement measurement

Other keywords: broadband source; linear CCD array; channelled spectrum; low coherence interferometric sensor; 1.5 mm; laser diode source

Subjects: Image sensors; Laser applications; Optical interferometry; Spatial variables measurement; Spatial variables measurement; Sensing and detecting devices

References

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      • C. Belleville , G. Duplain . White light interferometric multimode fiber-optic strain sensor. Opt. Lett. , 78 - 80
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      • Trouchet, D., Desforges, F.X., Graidorge, P., Lefevre, H.C.: `Remote fiber optic measurement of air index with white interferometry', Proc. 8th Int. Conf. on Optical Fibre Sensors, 29th–31st January 1992, Monterey, p. 57–60.
    4. 4)
      • R.A. Patten . Michelson interferometer as a remote gauge. Appl. Opt. , 2717 - 2721
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