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Two-dimensional E-field mapping with subpicosecond temporal resolution

Two-dimensional E-field mapping with subpicosecond temporal resolution

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© The Institution of Electrical Engineers
Published

A new contactless reflection-mode electro-optic sampling technique is described which is capable of characterising the electrical response of microstructures in two dimensions with micrometre spatial resolution, a temporal response of a fraction of a picosecond and millivolt sensitivity. A GaAs-based sampling technique which would have minimum interference with the test circuit is also proposed.

Inspec keywords: electric field measurement; VLSI; field plotting; integrated circuit testing; large scale integration

Other keywords: LSI; electro-optic sampling technique; very-high-speed semiconductor devices; reflection-mode; subpicosecond temporal resolution; GaAs-based sampling technique; contactless method; micrometre spatial resolution; millivolt sensitivity; VLSI testing; birefringence; microstructure characterisation; electrical response; two-dimensional E-field mapping; electric field distribution

Subjects: Semiconductor integrated circuits; Voltage measurement; Measurement; Production facilities and engineering; Manufacturing processes; Testing

References

    1. 1)
      • J.A. Valdmanis , G.A. Mourou , C.W. Gabel . Subpicosecond electrical sampling. IEEE J. Quantum Electron. , 664 - 667
    2. 2)
      • G.A. Mourou , K.E. Meyer . Subpicosecond electro-optic sampling using coplanar strip transmission lines. Appl. Phys. Lett. , 492 - 494
    3. 3)
      • D.H. Auston , A.M. Johnson , P.R. Smith , J.C. Bean . Picosecond optoelectronic detection, sampling, and correlation measurements in amorphous semiconductors. Appl. Phys. Lett. , 371 - 373
    4. 4)
      • J.A. Valdmanis , G.A. Mourou , C.W. Gabel . Subpicosecond electrical sampling. SPIE , 142 - 148
    5. 5)
      • Meyer, K.E., Mourou, G.A.: `Subpicosecond electro-optic sampling using coplanar strip transmission lines', Proceedings of conference on lasers and electro-optics, 1984, , p. 70.
    6. 6)
      • Meyer, K.E., Mourou, G.A.: `Subpicosecond electro-optic sampling using coplanar strip transmission lines', Proceedings of 4th international conference on ultrafast phenomena, 1984, , p. 406–408.
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