© The Institution of Engineering and Technology
A novel micro-silicon resonant pressure sensor with two mechanically coupled resonators is presented. When pressure acts on the diaphragm, the perturbed stress will cause stiffness perturbation, leading to mode-localisation phenomenon. Therefore, pressure can be sensed by measuring the amplitude ratio shift. This novel structure is achieved by fabrication on silicon-on-insulator wafer. The measured result shows that the relative amplitude ratio shift (86,819.9 ppm/kPA) is 197.5 times higher than the shift in resonance frequency (439.6 ppm/kPA).
References
-
-
1)
-
1. Pierre, C.: ‘Mode localization and eigenvalue loci veering phenomena in disordered structures’, J. Sound Vib., 1988, 126, (3), pp. 485–502, (doi: 10.1016/0022-460X(88)90226-X).
-
2)
-
3. Spletzer, M., Raman, A., Wu, A.Q., et al: ‘Ultrasensitive mass sensing using mode localization in coupled microcantilevers’, Appl. Phys. Lett., 2006, 88, (25), pp. 254102.1–254102.3 (doi: 10.1063/1.2216889).
-
3)
-
11. Zhang, H., Li, B., Yuan, W., et al: ‘An acceleration sensing method based on the mode localization of weakly coupled resonators’, J. Microelectromechan. Syst., 2016, 25, (2), pp. 286–296 (doi: 10.1109/JMEMS.2015.2514092).
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