access icon free Electrical characterisation of epitaxial AlN/Nb2N heterostructures grown by molecular beam epitaxy

Initial electrical characterisation of epitaxial AlN/Nb2N heterostructures grown by molecular beam epitaxy on 6H-SiC substrates is presented. Metal–insulator–metal (MIM) devices of varying diameter were used for current–voltage and capacitance–voltage (CV) measurements at various temperatures. From CV measurements, a dielectric constant of 10.1 was extracted along with a linear dependence of capacitance on temperature of 0.02 nF/cm2/°C. Leakage current was determined to be consistent with a Poole–Frenkel conduction mechanism at electric fields >1.25 MV/cm with an extracted trap ionisation energy of 0.82 eV. Electric field breakdown ranged between 3.4 and 5.6 MV/cm with some dependence on the diameter of the MIM device. These initial findings demonstrate the potential for high-power devices based on AlN.

Inspec keywords: semiconductor heterojunctions; aluminium compounds; MIM devices; niobium compounds; molecular beam epitaxial growth; capacitance; semiconductor growth; semiconductor epitaxial layers; permittivity; Poole-Frenkel effect; semiconductor device breakdown; III-V semiconductors

Other keywords: electric field breakdown; AlN-Nb2N; leakage current; extracted trap ionisation energy; dielectric constant; current–voltage measurements; Poole–Frenkel conduction mechanism; 6H-SiC substrates; epitaxial heterostructures; capacitance–voltage measurements; SiC; metal–insulator–metal devices; molecular beam epitaxy

Subjects: Semiconductor device modelling, equivalent circuits, design and testing; High-field transport and nonlinear effects (semiconductors/insulators); Vacuum deposition; Semiconductor junctions; Vacuum deposition; Electrical properties of semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions

http://iet.metastore.ingenta.com/content/journals/10.1049/el.2016.0331
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