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Inspec keywords: optoelectronic devices; III-V semiconductors; antireflection coatings; oxidation; gallium arsenide

Other keywords: refractive index; GaAs; oxide films; smooth interfaces; thermal oxidation; optoelectronic devices; effective antireflection layers

Subjects: Corrosion, oxidation, etching, and other surface treatments; Optical coatings and filters; Optical coatings; Surface treatment (semiconductor technology); II-VI and III-V semiconductors

http://iet.metastore.ingenta.com/content/journals/10.1049/el.2015.0852
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This article has the following associated article(s):
Gallium arsenide antireflection layer via direct wet thermal oxidation