AlN film SAW resonator integrated with metal structure

Lin Shu; Jianying Jiang; Bin Peng; Yu Wang; Xingzhao Liu

AlN film SAW resonator integrated with metal structure

View Fulltext

Author(s): Lin Shu ¹ ; Jianying Jiang ¹ ; Bin Peng ¹ ; Yu Wang ¹ ; Xingzhao Liu ¹
- Affiliations: 1: University of Electronic Science and Technology of China, Chengdu 610054, Sichuan, People's Republic of China
Source: Volume 51, Issue 5, 05 March 2015, p. 379 – 380
DOI: 10.1049/el.2014.3495 , Print ISSN 0013-5194, Online ISSN 1350-911X

Received 28/09/2014, Published 19/02/2015

A novel surface acoustic wave (SAW) resonator integrated on a metal substrate is presented. The devices were fabricated on the aluminium nitride (AlN) thin films deposited by mid-frequency magnetron sputtering on polished TC4 titanium alloy substrates. Using a two-step growth method, AlN film with a full-width at half-maximum of 4.1° had been prepared. The AlN film SAW resonator shows a resonance frequency of 129 MHz and an electromechanical coupling coefficient of 0.28%. The measurement results agree well with the simulation results. This integrated SAW resonator can be used as a good strain sensor in metal structure health monitoring.

References

1. 1)
  - 9. Hashimoto, K.-y.: ‘Surface acoustic wave devices in telecommunications: modelling and simulation’ (Springer-Verlag, Berlin Heidelberg, Germany, 2000).
2. 2)
  - 10. Lin, C.M., Chen, Y.Y., Felmetsger, V.V., Senesky, D.G., Pisano, A.P.: ‘AlN/3C-SiC composite plate enabling high-frequency and high-Q micromechanical resonators’, Adv. Mater., 2012, 24, pp. 2722–2727 (doi: 10.1002/adma.201104842).
3. 3)
  - 7. Krishnan, N.R., Nemade, H.B., Paily, R.: ‘Simulation of one-port SAW resonator using COMSOL multiphysics’. Proc. of COMSOL Users Conf. 2006, Bangalore, India, November 2006.
4. 4)
  - 1. Jiang, X., Kim, K., Zhang, S., Johnson, J., Salazar, G.: ‘High-temperature piezoelectric sensing’, Sensors, 2013, 14, pp. 144–169 (doi: 10.3390/s140100144).
5. 5)
  - 5. Naik, R.S., Lutsky, J.J., Reif, R.: ‘Measurements of the bulk, C-axis electromechanical coupling constant as a function of AlN film quality’, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, 2000, 47, pp. 292–296 (doi: 10.1109/58.818773).
6. 6)
  - 4. Aubert, T., Elmazria, O., Assouar, B.: ‘Surface acoustic wave devices based on AlN/sapphire structure for high temperature applications’, Appl. Phys. Lett., 2010, 96, p. 203503 (doi: 10.1063/1.3430042).
7. 7)
  - 11. Avramov, I.D., Voigt, A., Rapp, M.: ‘Rayleigh SAW resonators using gold electrode structure for gas sensor applications in chemically reactive environments’, Electron. Lett., 2005, 41, pp. 450–452 (doi: 10.1049/el:20050432).
8. 8)
  - 2. Wilson, W.C., Rogge, M.D., Fisher, B.H., Malocha, D.C., Atkinson, G.M.: ‘Fastener failure detection using a surface acoustic wave strain sensor’, IEEE Sens. J., 2012, 12, pp. 1993–2000 (doi: 10.1109/JSEN.2011.2181160).
9. 9)
  - 6. Iriarte, G.F., Calle, F.: ‘Synthesis of C-axis oriented AlN thin films on different substrates: a review’, Mater. Res. Bull., 2010, 45, pp. 1039–1045 (doi: 10.1016/j.materresbull.2010.05.035).
10. 10)
  - 3. Stoney, R., Geraghty, D., O'Donnell, G.E.: ‘Characterization of differentially measured strain using passive wireless surface acoustic wave (SAW) strain sensors’, IEEE Sens. J., 2014, 14, pp. 722–728 (doi: 10.1109/JSEN.2013.2285722).
11. 11)
  - 8. Dirac Delta Consultants Ltd Research: ‘DiracDelta.co.uk, science and engineering encyclopedia: Titanium’. Available at http://www.diracdelta.co.uk/science/source/t/i/titanium/source.html, accessed June 2014.
12. 12)
  - 12. Sung, C.C., Chiang, Y.F., Ro, R., Lee, R., Wu, S.: ‘Effects of conducting layers on surface acoustic wave in AlN films on diamond’, J. Appl. Phys., 2009, 106, p. 24905 (doi: 10.1063/1.3176930).

Correspondence

This article has following corresponding article(s):

in brief

Login

Not registered yet?

Share

Tools

Login to add to favourites

Key

AlN film SAW resonator integrated with metal structure

References

Related content