High-power in-phase coherently coupled VCSEL array based on proton implantation
- Author(s): Meng Xun 1 ; Chen Xu 1 ; Yiyang Xie 2 ; Yanxu Zhu 1 ; Mingming Mao 1 ; Kun Xu 1 ; Jun Wang 1 ; Jie Liu 1 ; Hongda Chen 2
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View affiliations
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Affiliations:
1:
The Key Laboratory of Optoelectronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, People's Republic of China;
2: The State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, People's Republic of China
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Affiliations:
1:
The Key Laboratory of Optoelectronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, People's Republic of China;
- Source:
Volume 50, Issue 15,
17 July 2014,
p.
1085 – 1086
DOI: 10.1049/el.2014.1298 , Print ISSN 0013-5194, Online ISSN 1350-911X
Three-element in-phase coherently coupled arrays of vertical cavity surface-emitting lasers (VCSELs) were fabricated using proton implantation. The arrays show excellent beam quality with a far-field divergence of 4°, while maintaining a stable in-phase mode until a maximum output power of 4 mW under continuous-wave condition. The process for the arrays is simple and the cost is low.
Inspec keywords: optical fabrication; semiconductor quantum wells; quantum well lasers; gallium arsenide; III-V semiconductors; laser beams; laser cavity resonators; surface emitting lasers; aluminium compounds; semiconductor laser arrays; laser modes
Other keywords: stable in-phase mode; power 4 mW; beam quality; far-field divergence; vertical cavity surface emitting lasers; GaAs-Al0.3Ga0.7As quantum wells; GaAs-Al0.3Ga0.7As; output power; high-power in-phase coherently coupled VCSEL array; continuous-wave conditions; three-element in-phase coherently coupled arrays; proton implantation
Subjects: Laser resonators and cavities; Laser beam interactions and properties; Laser resonators and cavities; Lasing action in semiconductors; Optical fabrication, surface grinding; Laser beam characteristics and interactions; Semiconductor lasers; Design of specific laser systems
References
-
-
1)
- D.F. Siriani , K.D. Choquette . In-phase, coherent photonic crystal vertical-cavity surface-emitting laser arrays with low divergence. Electron. Lett. , 712 - 714
-
2)
-
12. Mao, M.M., Xu, C., Xie, Y.Y., Kan, Q., Xun, M., Xu, K., Wang, J., Ren, H.Q., Chen, H.D.: ‘Implant defined 3 × 3 in phase coherently coupled vertical cavity surface emitting lasers array’, Photonics J., 2013, 5, (6), p. 1502606 (doi: 10.1109/JPHOT.2013.2292351).
-
-
3)
- D. Zhou , L. Mawst . Two-dimensional phase-locked antiguided vertical-cavity surface-emitting laser arrays. Appl. Phys. Lett. , 15 , 2307 - 2309
-
4)
-
7. Morgan, R.A., Kojima, K., Mullally, T., Guth, G.D., Focht, M.W., Leibenguth, R.E., Asom, M., Asom, M.: ‘High-power coherently coupled 8 × 8 vertical cavity surface emitting laser array’, Appl. Phys. Lett., 1992, 61, (10), p. 1160 (doi: 10.1063/1.107632).
-
-
5)
-
11. Mao, M.M., Xu, C., Kan, Q., Xie, Y.Y., Xun, M., Xu, K., Liu, J.C., Ren, H.Q., Chen, H.D.: ‘High beam quality of in-phase coherent coupling 2-D VCSEL arrays based on proton-implantation’, IEEE Photonics Technol. Lett., 2014, 26, (4), pp. 395–397 (doi: 10.1109/LPT.2013.2295101).
-
-
6)
-
4. Siriani, D.F., Choquette, K.D.: ‘Electronically controlled two-dimensional steering of in-phase coherently coupled vertical-cavity laser arrays’, IEEE Photonics Technol. Lett., 2011, 23, (3), pp. 167–169 (doi: 10.1109/LPT.2010.2096207).
-
-
7)
- A. Danner , J. Lee , J. Raftery , N. Yokouchi , K. Choquette . Coupled-defect photonic crystal vertical cavity surface emitting lasers. Electron. Lett. , 18 , 1323 - 1324
-
8)
-
5. Harris, J.S., Sullivan, T.O., Sarmiento, T., Lee, M.M., Vo, S.: ‘Emerging applications for vertical cavity surface emitting lasers’, Semicond. Sci. Technol., 2011, 26, (1), p. 14010 (doi: 10.1088/0268-1242/26/1/014010).
-
-
9)
-
1. Yoo, H.J., Hayes, J.R., Paek, E.G., Harbison, J.P., Florez, L.T., Kwon, Y.S.: ‘Phase-locked two-dimensional arrays of implant isolated vertical cavity surface emitting lasers’, Electron. Lett., 1990, 26, (23), pp. 1944–1946 (doi: 10.1049/el:19901258).
-
-
10)
-
2. Hadley, G.R.: ‘Modes of a two-dimensional phase-locked array of vertical-cavity surface-emitting lasers’, Opt. Lett., 1990, 15, (21), pp. 1215–1217 (doi: 10.1364/OL.15.001215).
-
-
11)
-
6. Yoo, H.J., Scherer, A., Harbison, J.P., Florez, L.T., Paek, E.G., Van der Gaag, B.P., Hayes, J.R., Von Lehmen, A., Kapon, E., Young-Se, K.: ‘Fabrication of a two-dimensional phased array of vertical-cavity surface-emitting lasers’, Appl. Phys. Lett., 1990, 56, (13), p. 1198 (doi: 10.1063/1.102558).
-
-
12)
- D. Botez , L.J. Mawst , P. Hayashida , G. Peterson , T.J. Roth . High-power diffraction-limited-beam operation from phase-locked diode-laser arrays of closely spaced ‘leaky’ waveguides (antiguides). Appl. Phys. Lett. , 464 - 466
-
13)
-
10. Lehman, A.C., Choquette, K.D.: ‘One- and two-dimensional coherently coupled implant defined vertical cavity laser arrays’, IEEE Photonics Technol. Lett., 2007, 19, (19), pp. 1421–1423 (doi: 10.1109/LPT.2007.903503).
-
-
1)
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