Rapidly swept, ultra-widely-tunable 1060 nm MEMS-VCSELs

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© The Institution of Engineering and Technology
Published 08/11/2012

Abstract

Demonstrated are 1060 nm microelectromechanical-systems-based tunable vertical-cavity surface-emitting lasers (MEMS-VCSELs) with a 100 nm continuous tuning range under repetitively scanned operation at rates beyond 500 kHz and a 90 nm continuous tuning range under static operation. These devices employ a thin strained InGaAs multiple quantum well active region integrated with a fully oxidised GaAs/AlxOy bottom mirror and a suspended dielectric top mirror. The devices are optically pumped via 850 nm light. These ultra-widely tunable lasers represent the first MEMS-VCSELs reported in this wavelength range, and are ideally suited for application in ophthalmic swept-source optical coherence tomography.

Inspec keywords: mirrors; surface emitting lasers; indium compounds; III-V semiconductors; optical pumping; quantum well lasers; optical tomography; micromechanical devices; gallium arsenide

Other keywords: GaAs-AlxOy; wavelength 100 nm; wavelength 1060 nm; InGaAs; bottom mirror; microelectromechanical-systems-based tunable vertical-cavity surface-emitting lasers; dielectric top mirror; multiple quantum well; ophthalmic swept-source optical coherence tomography; VCSEL; wavelength 90 nm; MEMS; wavelength 850 nm; tunable lasers

Subjects: Optical and laser radiation (medical uses); Optical lenses and mirrors; Semiconductor lasers; Laser resonators and cavities; Optical and laser radiation (biomedical imaging/measurement); Fabrication of MEMS and NEMS devices; Design of specific laser systems; Laser resonators and cavities; Design and modelling of MEMS and NEMS devices; Lasing action in semiconductors; Micromechanical and nanomechanical devices and systems

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      • Jayaraman, V., Jiang, J., Potsaid, B., Cole, G., Fujimoto, J., Cable, A.: `Design and performance of broadly tunable, narrow line-width, high repetition rate 1310 nm VCSELs for swept source optical coherence tomography', Proc. SPIE – The International Society for Optical Engineering, 2012
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