RT Book SR Electronic(1) A1 A. Baca A1 C. Ashby YR 2005 T1 Fabrication of GaAs Devices PB Institution of Engineering and Technology JF Materials, Circuits and Devices K1 Schottky contacts K1 heterojunction bipolar transistors K1 optoelectronic device K1 MIS GaAs device K1 field effect transistors K1 semiconductor growth K1 passivation K1 dry etching K1 ohmic contacts K1 cleaning K1 wet oxidation K1 GaAs K1 semiconductor properties K1 GaAs device fabrication SN 9780863413537 UL https://digital-library.theiet.org/;jsessionid=9a60sfbic27e7.x-iet-live-01content/books/cs/pbep006e