This chapter will cover the physics, material science and practical aspects of metal/semiconductor interfaces that are fabricated for ohmic contacts to GaAs. The material presented in this chapter focuses on the generalised GaAs-based ohmic contact, its ideal properties and a wide range of implementations.

Inspec keywords: ohmic contacts; metal-semiconductor-metal structures; gallium arsenide; III-V semiconductors

Other keywords: metal/semiconductor interfaces; GaAs; ohmic contacts

Subjects: Electrical properties of metal-nonmetal contacts