This Chapter discussed the following: nanophotonic cavities tuning; nanoelectromechanical systems; MEMS; NEMS.

Chapter Contents:

• 7.1 Introduction
• 7.2 PhC nanocavity designs
• 7.3 MEMS and NEMS
• 7.3.1 MEMS/ NEMS comb-drive actuator design
• 7.3.2 NEMS fabrication processes
• 7.3.3 NEMS and nanophotonic devices testing
• 7.4 Tuning of PhC nanocavities with NEMS-driven dielectric probes
• 7.4.1 Tuning by single-tip dielectric probes
• 7.4.2 Tuning by multi-tip dielectric probes
• 7.5 Tuning of PhC nanocavities with NEMS-driven coupled cavities
• 7.5.1 Tuning with dual-cavity coupling
• 7.5.2 Tuning with triple-cavity coupling
• 7.5.3 Ultrafine tuning of double-coupled multi-mode cavities
• 7.6 Tuning of PhC nanocavities with NEMS-driven nano-deformation
• 7.7 Conclusions
• References

Inspec keywords: nanophotonics; nanoelectromechanical devices; optical tuning

Other keywords: MEMS; nanophotonic cavities; NEMS; nanoelectromechanical systems

Subjects: Nanophotonic devices and technology; Nanophotonic devices and technology; Nonlinear optics; Nonlinear optics and devices; Micromechanical and nanomechanical devices and systems; Textbooks; MEMS and NEMS device technology