%0 Electronic Chapter %A Siegfried Selberherr %+ Institute for Microelectronics, Technical University Vienna %A Claus Fischer %+ Institute for Microelectronics, Technical University Vienna %A Stefan Halama %+ Institute for Microelectronics, Technical University Vienna %A Christoph Pichler %+ Institute for Microelectronics, Technical University Vienna %A Gerhard Rieger %+ Institute for Microelectronics, Technical University Vienna %A Gerhard Schrom %+ Institute for Microelectronics, Technical University Vienna %A Thomas Simlinger %+ Institute for Microelectronics, Technical University Vienna %T Device structures and device simulation techniques %K device reliability %K device performance %K VLSI technology %K technology computer-aided design %K TCAD %K circuit simulation %K device yield %K device structures %K device simulation %B Low-power HF Microelectronics: a unified approach %D 1996 %I Institution of Engineering and Technology %P 57-84 %R doi:10.1049/PBCS008E_ch2 %S Materials, Circuits and Devices %U https://digital-library.theiet.org/;jsessionid=ks7gohf8hc8i.x-iet-live-01content/books/10.1049/pbcs008e_ch2