Inspec keywords: silicon; semiconductor thin films; elemental semiconductors; semiconductor heterojunctions; amorphous semiconductors; semiconductor growth; rapid thermal annealing; sputter deposition; thermoelectricity; thermoelectric devices; magnesium compounds

Other keywords: rapid thermal annealing; heterostructured thermoelectric devices; amorphous silicon-magnesium silicide-stacked heterostructure thin film layers; radiofrequency sputtering; Si-Mg2Si

Subjects: Sputter deposition; Other semiconductor materials; Thin film growth, structure, and epitaxy; Deposition by sputtering; Other heat and thermomechanical treatments; Electrical properties of semiconductor-to-semiconductor contacts, p-n junctions, and heterojunctions; Elemental semiconductors; Semiconductor junctions; Annealing processes in semiconductor technology; Thermoelectric effects (semiconductors/insulators); Electrical properties of amorphous and glassy semiconductors (thin films, low-dimensional and nanoscale structures); Amorphous and glassy semiconductors