Inspec keywords: spin coating; antireflection coatings; nanofabrication; gold; nanoporous materials; semiconductor thin films

Other keywords: antireflective zeolite fabrication; facile mass production; spin-coating antireflective films; Au; gold nanoporous film fabrication

Subjects: Nanometre-scale semiconductor fabrication technology; Optical coatings; Optical coatings and filters; Thin film growth, structure, and epitaxy; Other thin film deposition techniques; Methods of nanofabrication and processing; Methods of thin film deposition