Inspec keywords: silicon; elemental semiconductors; integrated optics; semiconductor epitaxial layers; optical waveguide components

Other keywords: intrinsic Si layer; integrated-optical components; semiconductor; heavily doped Si substrate; epitaxial layers; wavelengths 1.6 microns; end-fire coupling; active components; intersecting channel waveguides; single crystal Si; optical power divider; plasma-etching; wavelength 1.3 microns

Subjects: Optical waveguides; Optical waveguides and couplers; Integrated optics; Integrated optics