Inspec keywords: semiconductor device models; current density; MOSFET; nanoelectronics; three-dimensional integrated circuits

Other keywords: planar MOSFET; metal-oxide semiconductor field effect transistor; control functions; 3D nanoscale MOSFET; charge density; electrostatic potential; gate control; TCAD simulations; probing terminal control mechanisms; current density; computational technique; terminal influence; terminal response; semiconductor device

Subjects: Semiconductor device modelling, equivalent circuits, design and testing; Insulated gate field effect transistors