Inspec keywords: biochemistry; biosensors; permeability; molecular biophysics; MOS capacitors; silicon compounds; proteins; elemental semiconductors; nanoelectronics; nanofabrication; transistors

Other keywords: gate dielectric; Al2O3 capacitors; in vivo biosensors; alkali ion dose; threshold voltage; transistor operation; high-salt concentration bodily fluids; detectable alkali ions; mobile alkali ions; alkali ion penetration; triangular voltage sweep technique; metal-oxide-semiconductor; protein sensing; PBS solution; sterile physiological buffer solution; impermeability; metal oxide semiconductor capacitor; silicon dioxide MOS capacitors; SiO₂; size 100 nm to 10 nm

Subjects: Methods of nanofabrication and processing; Biosensors; Biosensors; Semiconductor devices; Metal-insulator-semiconductor structures; Nanometre-scale semiconductor fabrication technology; Molecular biophysics; Elemental semiconductors; Electrical conductivity of elemental semiconductors; Capacitors