Inspec keywords: surface emitting lasers; lithography; laser mirrors

Other keywords: lithographic VCSEL; proton-implanted VCSEL; transverse mode confinement; oxide VCSEL; lasing spectra; side-mode-suppression ratio; index confinement; semiconductor mirror; optical mode confinement; shallow internal mesa; lithographic vertical-cavity surface-emitting lasers; beam patterns

Subjects: Lasing action in semiconductors; Lithography (semiconductor technology); Semiconductor lasers; Optical lenses and mirrors