Inspec keywords: internal stresses; Q-factor; micromechanical devices; capacitors; etching; microfabrication

Other keywords: interwoven structure; typical MEMS parallel-plate design; quality factor; etching holes; RF MEMS interwoven capacitor immune; MEMS processing; residual stress; polyMUMPS processing; residual stress warping

Subjects: Micromechanical and nanomechanical devices and systems; Capacitors; Fabrication of MEMS and NEMS devices